Front Opening Unified Pod for PLP
[Industrial field]
Semiconductor
PANEL FOUP can transport large size panels securely.
[Applications]
- PLP process carrier
- Conforms to SEMI Standard.
- Mechanical interfaces with load port , Manual open / close.
- Humidity control.
- Panel size:600mm×600mm / 510mm×515mm
- 12 or 6 Slots
- Main parts of FOUP: Metal.