HOME > PRODUCTS > FOUP 300EX

FOUP 300EX 300mm / FOUP ESD Version - Front Opening Unified Pod for 300mm Wafers, SEMI E47.1

Option

Design concept and Product Features

FOUP 300EX
  • Single molded structure to minimize cleaning drying cycle time, prevent particle generation and to maintain dimensional accuracy
  • Capable of conductivity through top, shell/teeth to bottom and side-rails to dissipate electric charge
  • Roller Clamping Latch Mechanism assures complete door closing
  • Outstanding sealing capability to prevent particles and contamination from environment
  • Long life including gasket
  • Optional inert gas purge

Specification

  • Conforms to SEMI Standards:
    E47.1, E1.9, E15.1, E57, E62 and S8

  • AMHS capability
    Robust design featuring in automated material handling system operating 8kg payload with overhead transport (OHT), automated-guided vehicle (AGV), person-guided vehicle (PGV). and forklift conveyors, loadports, storage or stocker shelves and workstations properly working with.

Back to top