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- FIMS Door/Automated operation
- Manual open/close function
- Robust structure for perfect seal during transportation
- Design to minimize Cleaning and Drying Cycle Time
- Conforms to SEMI Standard M31
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Dimensions |
: |
W389 x L340 x H331 (mm) |
| Weight |
: |
7.5kg(16.9lb) Including 25 wafers
4.3kg(9.7lb) without wafers |
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