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- Manual operation
- One piece, shingle mold design
- Simple, Reliable design
- High Integrity seal and Vent Filer
- Easy to Assemble
- Conforms to SEMI Standard M31
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Dimensions |
: |
W404 x L360 x H331 (mm) |
| Weight |
: |
7.9kg(17.5lb) Including 25 wafers
4.7kg(10.4lb) without wafers |
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| PART Number |
PART Name |
Materials |
| MW 300G-A |
Body |
Polycarbonate |
| MW 300G-BF |
Front Retainer |
Thermoplastic Elastomer |
| MW 300G-C |
Door |
Polycarbonate |
| MW 300G-E |
Gasket |
Polycarbonate+Thermoplastic Elastomer |
| MW 300F-F2 |
Power Clamp |
Polycarbonate |
|

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| Side View |
|
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| Inside View |
|
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| Bottom View |
|
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| Bottom View with Optional Parts |
|
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| Front Retainer |
|
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| Frame Structure Gasket |
|
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| Vent Filter |
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