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- Single molded structure to minimize cleaning drying cycle time, prevent particle generation and to maintain dimensional accuracy
- Capable of conductivity through top, shell/teeth to bottom and side-rails to dissipate electric charge
- Roller Clamping Latch Mechanism assures complete door closing
- Outstanding sealing capability to prevent particles and contamination from environment
- Long life including gasket
- Optional inert gas purge
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- Conforms to SEMI Standards:
E47.1, E1.9, E15.1, E57, E62 and S8
- AMHS capability
Robust design featuring in automated material handling system operating 8kg payload with overhead transport (OHT), automated-guided vehicle (AGV), person-guided vehicle (PGV). and forklift conveyors, loadports, storage or stocker shelves and workstations properly working with.
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